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Universal-300 B

The Universal-300 B is a 12-inch CMP device based on innovative technology developed by Hwatsing with independent intellectual property rights. The device is equipped with superior performance polishing units, compatible with 4/6/8/12 inch wafers, suitable for a variety of materials, can achieve ultra-high wafer surface flatness, it has a small footprint, high cost performance advantages, can meet the needs of mature process technology, widely used in silicon wafer, third generation semiconductor, MEMS and other manufacturing processes.

Multi-section polishing head

Compatible with 4/6/8/12 inch wafers

Dry in and wet out of products

Small floor space, high cost performance

Satisfy mature process technology requirements

Used for CMP processes such as Oxide/SiN/STI/Poly/Cu/W

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