iPUMA-LT is a 12-inch cold implanter developed from a mature high current implanter by Hwatsing, under the requirements of mature device technologies. The implanter is equipped with cryogenic operating module, temperature detection unit and temperature warm-up module to meet the demands of mature process technologies.
Domestically developed cryogenic implantation platform
Cryogenic process module
Temperature warm-up module
Meeting the technical requirement for the mature process