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Ion implanter with cryogenic process iPUMA-LT

iPUMA-LT is a 12-inch cold implanter developed from a mature high current implanter by Hwatsing, under the requirements of mature device technologies. The implanter is equipped with cryogenic operating module, temperature detection unit and temperature warm-up module to meet the demands of mature process technologies.

Domestically developed cryogenic implantation platform

Cryogenic process module

Temperature warm-up module

Meeting the technical requirement for the mature process

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